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Atmospheric-pressure plasma-enhanced ...
Research Article
Atmospheric-pressure plasma-enhanced spatial atomic layer deposition of silicon nitride at low temperature
Jie Shen,     Fred Roozeboom,     Alfredo Mameli
10.3897/aldj.1.101651
 27-03-2023
 Unique: 2078 | Total: 3021  | Access Period:
 1-11
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Transformation kinetics for low temperature ...
Research Article
Transformation kinetics for low temperature post-deposition crystallization of TiO 2 thin films prepared via atomic layer deposition (ALD) from tetrakis(dimethylamino)titanium(IV) (TDMAT) and water
Jamie P. Wooding,     Shawn A. Gregory,     Amalie Atassi,     Guillaume Freychet, Kyriaki Kalaitzidou,     Mark D. Losego
10.3897/aldj.1.101276
 27-03-2023
 Unique: 1737 | Total: 2379  | Access Period:
 1-18
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