Articles by Author

Author

Fred Roozeboom

University of Twente
Enschede, Netherlands
https://people.utwente.nl/f.roozeboom

1 article by this author

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Research Article

Atmospheric-pressure plasma-enhanced spatial atomic layer deposition of silicon nitride at low temperature

Jie Shen, Fred Roozeboom, Alfredo Mameli

10.3897/aldj.1.101651

27-03-2023

Unique: 955 | Total: 1419

1-11

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