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ATOMIC LAYER DEPOSITION
INTERNATIONAL JOURNAL
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Guillaume Freychet
1 article by this author
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Research Article
Transformation kinetics for low temperature post-deposition crystallization of TiO
2
thin films prepared via atomic layer deposition (ALD) from tetrakis(dimethylamino)titanium(IV) (TDMAT) and water
Jamie P. Wooding
,
Shawn A. Gregory
,
Amalie Atassi
,
Guillaume Freychet
,
Kyriaki Kalaitzidou
,
Mark D. Losego
10.3897/aldj.1.101276
27-03-2023
Unique: 1572 | Total: 2162
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