Articles by Author

Author

Alfredo Mameli

Holst Centre / TNO
Eindhoven, Netherlands
https://scholar.google.com/citations?...

1 article by this author

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Research Article

Atmospheric-pressure plasma-enhanced spatial atomic layer deposition of silicon nitride at low temperature

Jie Shen, Fred Roozeboom, Alfredo Mameli

10.3897/aldj.1.101651

27-03-2023

Unique: 964 | Total: 1432

1-11

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