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ATOMIC LAYER DEPOSITION
INTERNATIONAL JOURNAL
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Alfredo Mameli
Holst Centre / TNO
Eindhoven, Netherlands
https://scholar.google.com/citations?...
1 article by this author
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Research Article
Atmospheric-pressure plasma-enhanced spatial atomic layer deposition of silicon nitride at low temperature
Jie Shen
,
Fred Roozeboom
,
Alfredo Mameli
10.3897/aldj.1.101651
27-03-2023
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