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  • Article InfoArticle Info
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  • Article title
  • Abstract
  • Key words
  • 1. Introduction
  • 2. Experimental
    • 2.1. ALD conditions
    • 2.2. Characterization
  • 3. Results and discussion
    • 3.1. Controlling grain size in post-deposition annealed films
    • 3.2. Amorphous to crystalline transformation kinetics
    • 3.3. Controlling microstructure
    • 3.4. Time-Temperature-Transformation (TTT) diagrams for plate-like anatase crystal growth
  • 4. Conclusions
  • Acknowledgements
  • References
  • Supplementary material
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