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ATOMIC LAYER DEPOSITION
INTERNATIONAL JOURNAL
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Mark Losego
Georgia Tech.
Georgia, United States of America
https://www.mse.gatech.edu/people/mar...
2 articles by this author
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Research Article
Crystalline as-deposited TiO
2
anatase thin films grown from TDMAT and water using thermal atomic layer deposition with
in situ
layer-by-layer air annealing
Jamie P. Wooding
,
Kyriaki Kalaitzidou
,
Mark D. Losego
10.3897/aldj.2.117753
04-06-2024
Unique: 948 | Total: 1246
| Access Period:
1-18
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Research Article
Transformation kinetics for low temperature post-deposition crystallization of TiO
2
thin films prepared via atomic layer deposition (ALD) from tetrakis(dimethylamino)titanium(IV) (TDMAT) and water
Jamie P. Wooding
,
Shawn A. Gregory
,
Amalie Atassi
,
Guillaume Freychet
,
Kyriaki Kalaitzidou
,
Mark D. Losego
10.3897/aldj.1.101276
27-03-2023
Unique: 1737 | Total: 2379
| Access Period:
1-18
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