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Jamie Wooding

Georgia Institute of Technology
Atlanta, United States of America

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Research Article

Transformation kinetics for low temperature post-deposition crystallization of TiO ₂ thin films prepared via atomic layer deposition (ALD) from tetrakis(dimethylamino)titanium(IV) (TDMAT) and water

Jamie P. Wooding, Shawn A. Gregory, Amalie Atassi, Guillaume Freychet, Kyriaki Kalaitzidou, Mark D. Losego

10.3897/aldj.1.101276

27-03-2023

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