Transformation kinetics for low temperature post-deposition crystallization of TiO 2 thin films prepared via atomic layer deposition (ALD) from tetrakis(dimethylamino)titanium(IV) (TDMAT) and water

Jamie P. Wooding; Shawn A. Gregory; Amalie  Atassi; Guillaume Freychet; Kyriaki Kalaitzidou; Mark D. Losego

doi:10.3897/aldj.1.101276

Research Article

Atomic Layer Deposition 1: 1-18
https://doi.org/10.3897/aldj.1.101276 (27 Mar 2023)

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Jamie P. Wooding, Kyriaki Kalaitzidou, Mark D. Losego (2024)
Crystalline as-deposited TiO 2 anatase thin films grown from TDMAT and water using thermal atomic layer deposition with in situ layer-by-layer air annealing. Atomic Layer Deposition 2: 1.

DOI: 10.3897/aldj.2.117753

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