Atomic Layer Deposition 1

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Robust surface functionalization of PDMS ...

Research Article

Robust surface functionalization of PDMS through atmospheric pressure atomic layer deposition

Albert Santoso, Bart J. van den Berg, Saeed Saedy, Eden Goodwin, Volkert van Steijn, J. Ruud van Ommen

10.3897/aldj.1.105146

07-08-2023

Unique: 2458 | Total: 3332

1-13

Atmospheric-pressure plasma-enhanced ...

Research Article

Atmospheric-pressure plasma-enhanced spatial atomic layer deposition of silicon nitride at low temperature

Jie Shen, Fred Roozeboom, Alfredo Mameli

10.3897/aldj.1.101651

27-03-2023

Unique: 2944 | Total: 4430

1-11

Transformation kinetics for low temperature ...

Research Article

Transformation kinetics for low temperature post-deposition crystallization of TiO ₂ thin films prepared via atomic layer deposition (ALD) from tetrakis(dimethylamino)titanium(IV) (TDMAT) and water

Jamie P. Wooding, Shawn A. Gregory, Amalie Atassi, Guillaume Freychet, Kyriaki Kalaitzidou, Mark D. Losego

10.3897/aldj.1.101276

27-03-2023

Unique: 2844 | Total: 4026

1-18

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