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ATOMIC LAYER DEPOSITION
INTERNATIONAL JOURNAL
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Subject: Atomic Layer Deposition
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Research Article
Crystalline as-deposited TiO
2
anatase thin films grown from TDMAT and water using thermal atomic layer deposition with
in situ
layer-by-layer air annealing
Jamie P. Wooding
,
Kyriaki Kalaitzidou
,
Mark D. Losego
10.3897/aldj.2.117753
04-06-2024
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