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  • ContentsContents
  • Article InfoArticle Info
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  • Article title
  • Abstract
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  • 1. Introduction
  • Methods
    • ALD conditions
    • Characterization
  • Results and discussion
    • TDMAT/H2O/air ALD Overview
    • TiO2-anatase crystallization
    • Probing TDMAT/H2O/air ALD growth parameters
    • Preliminary investigation of TDMAT/H2O/air ALD process optimization
  • Conclusion
  • Acknowledgements
  • References
  • E-mail and ORCID
  • Supplementary material
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