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Atomic Layer Deposition 2 (2024)
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Crystalline ...
Research Article
Crystalline as-deposited TiO 2 anatase thin films grown from TDMAT and water using thermal atomic layer deposition with in situ layer-by-layer air annealing
Jamie P. Wooding, Kyriaki Kalaitzidou,     Mark D. Losego
10.3897/aldj.2.117753
 04-06-2024
 Unique: 1328 | Total: 1916  | Access Period:
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