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Research Article
Atmospheric-pressure plasma-enhanced spatial atomic layer deposition of silicon nitride at low temperature
Jie Shen,     Fred Roozeboom,     Alfredo Mameli
10.3897/aldj.1.101651
 27-03-2023
 Unique: 683 | Total: 1058  | Access Period:
 1-11
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Research Article
Transformation kinetics for low temperature post-deposition crystallization of TiO 2 thin films prepared via atomic layer deposition (ALD) from tetrakis(dimethylamino)titanium(IV) (TDMAT) and water
Jamie P. Wooding,     Shawn A. Gregory,     Amalie Atassi,     Guillaume Freychet, Kyriaki Kalaitzidou,     Mark D. Losego
10.3897/aldj.1.101276
 27-03-2023
 Unique: 682 | Total: 1030  | Access Period:
 1-18
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Research Article
Robust surface functionalization of PDMS through atmospheric pressure atomic layer deposition
    Albert Santoso, Bart J. van den Berg,     Saeed Saedy,     Eden Goodwin,     Volkert van Steijn,     J. Ruud van Ommen
10.3897/aldj.1.105146
 07-08-2023
 Unique: 379 | Total: 527  | Access Period:
 1-13
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