Figure 12. 

SEM micrographs of TiO2 films grown from ~1120 total cycles (a) TDMAT/H2O/air ALD, (b) 1:1 TDMAT/H2O to TDMAT/H2O/air ALD, (c) 2:1 TDMAT/H2O to TDMAT/H2O/air ALD, (d) 3:1 TDMAT/H2O to TDMAT/H2O/air ALD deposited at 180 °C.

  
  Part of: Wooding JP, Kalaitzidou K, Losego MD (2024) Crystalline as-deposited TiO 2 anatase thin films grown from TDMAT and water using thermal atomic layer deposition with in situ layer-by-layer air annealing. Atomic Layer Deposition 2: 1-18. https://doi.org/10.3897/aldj.2.117753