Scanning electron microscopy image of PDMS samples coated with 5 cycles of Au precursors preceded by (a) 100 cycles and (b) 0 cycles of Ti precursors on PDMS samples cured at 150 °C. Both AP-ALD processes were conducted at 100 °C. The insets show the corresponding XPS spectra at the typical Au4f binding energy range. (c) UV-Vis spectra of PDMS, PDMS coated with TiOx, and PDMS coated with TiOx and AuNPs. The insets show a photograph of the three samples, a TEM image of the TiOx-AuNPs-coated PDMS sample, and the corresponding particle size distribution of the AuNPs.