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  • ContentsContents
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  • Article title
  • Abstract
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  • 1. Introduction
  • 2. Method
    • 2.1. Substrate preparation
    • 2.2. Atomic layer deposition of TiOx layers
    • 2.3. Atomic layer deposition of gold nanoparticles on TiOx layers
    • 2.4. Surface characterization of AP-ALD-treated PDMS samples
    • 2.5. Particle size distribution of the deposited AuNPs
    • 2.6 Wettability study of TiOx-coated PDMS samples
    • 2.7. Washing of the PDMS samples and ATR-FTIR characterization
    • 2.8. UV-Vis spectrophotometry study
  • 3. Result and discussion
    • 3.1. Simultaneous surface and subsurface growth in AP-ALD
    • 3.2. Hydrophilicity as indicator of functional surface
    • 3.3. Demonstration of functional surface
  • 4. Conclusion and outlook
  • Conflict of interest
  • Acknowledgments
  • References
  • E-mail and ORCID
  • Supplementary material
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