a) shows the growth per cycle (GPC) at (red square) 200 °C and (black square) 250 °C as a function of BDEAS exposure for a fixed N2 plasma exposure time. b) GPC at 200 °C (red square) and 250 °C (black square) as a function of the plasma exposure time, for BDEAS exposures above saturation. While the BDEAS exposure results in saturating behavior, the GPC as a function of the plasma exposure time shows a non-ideal behavior.