Research Article
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Article title
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Abstract
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Key words
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1. Introduction
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1. Experimental
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2.1. Materials and reactor
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2.2. Decoupling the effect of each half-reaction
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2.3. Analytical methods
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3. Results and discussion
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3.1. Process development
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3.2. Effect of plasma exposure on the material properties
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3.3. Comparison to PE-ALD and PE-CVD
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4. Conclusions
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Acknowledgments
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References
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Supplementary material