Time-temperature-transformation (TTT) diagrams for TiO2 amorphous to anatase phase transformation via isothermal post-deposition anneals for 1120 cycle ALD films deposited at temperatures: (a) 120 °C, (b) 140 °C, (c) 160 °C. Transformation curves are labeled for 5%, 50%, and 95% transformation to the TiO2-anatase phase. The abscissa axis is in base-10 log time.

 
 
  Part of: Wooding JP, Gregory SA, Atassi A, Freychet G, Kalaitzidou K, Losego MD (2023) Transformation kinetics for low temperature post-deposition crystallization of TiO 2 thin films prepared via atomic layer deposition (ALD) from tetrakis(dimethylamino)titanium(IV) (TDMAT) and water. Atomic Layer Deposition 1: 1-18. https://doi.org/10.3897/aldj.1.101276