a) Amorphous TiO2 to anatase phase transformation curves for films deposited at (a) 120 °C (solid square marker), (b) 140 °C (solid triangle marker) and (c) 160 °C (solid circle marker) and post-deposition annealed at 160 °C (gold-colored), 180 °C (blue-colored), 200 °C (red-colored), and 220 °C (black-colored). The solid lines are the X(t) model fit for the calculated reaction rate k and Avrami exponent n values. Linearized form of the crystalline fraction transformation curves to extract calculated reaction rate k and Avrami exponent n values for films deposited at (d) 120 °C, (e) 140 °C, and (f) 160 °C.

 
 
  Part of: Wooding JP, Gregory SA, Atassi A, Freychet G, Kalaitzidou K, Losego MD (2023) Transformation kinetics for low temperature post-deposition crystallization of TiO 2 thin films prepared via atomic layer deposition (ALD) from tetrakis(dimethylamino)titanium(IV) (TDMAT) and water. Atomic Layer Deposition 1: 1-18. https://doi.org/10.3897/aldj.1.101276